Recent advances in MEMS CAD tools are enabling improved qualification of existing manufacturing practices of MEMS based components. Traditional approaches to manufacturing of MEMS based products results in longer times to market and higher cost due to increase in the number of fabrications starts during the design process . Several contributing factors include: a lack of reliable material properties for a particular process, the difficulty in qualifying new process improvements and insufficient design rules for existing processes (i.e. the general lack of "standard processes") and perhaps most significantly the adoption of suitable design tools. The focus of this article is to introduce a new design methodology that enables virtual manufacturing ( VM) for MEMS products based on re-usable libraries (of MEMS components) in a standard EDA design tool. Such a methodology forms a major foundation for any organization interested in adopting a Design for Manufacturability ( DFM ) for MEMS.
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