ADHESIVE TAPE SEPARATING TOOL, MANUFACTURING APPARATUS OF SEMICONDUCTOR CHIP, MANUFACTURING APPARATUS OF MEMS DEVICE MANUFACTURING APPARATUS OF LIQUID EJECTING HEAD, AND SEPARATING METHOD OF ADHESIVE TAPE

摘要

Provided is an adhesive tape separating tool which separates adhesive tape bonded to one face of a work which includes an opening on the one face from the work, in which a protrusion portion forming region in which a plurality of protrusion portions are formed is provided on a face on a side which comes into contact with the work in the tape separating tool, and the protrusion portion forming region is disposed at a position separated from a position facing the opening on the one face of the work.