Highly-sensitive optical biosensors based on silicon-on-insulator nanowire waveguide

摘要

Summary form only given. Optical waveguide sensors based on silicon-on-insulator (SOI) nanowire have received great interest due to their potential applications in many fields including bacteria and virus detection, medical diagnostics, food quality control, environment monitoring, and drug development. Various types of SOI sensors have been developed, including Mach-Zehnder interferometer, microdisks and microring resonators. High-sensitivity sensors based on cascaded double-ring resonators and a Mach-Zehnder interferometer (MZI) cascaded with a microring resonator employing Vernier effect have recently been proposed and experimentally demonstrated. Simple and low-cost intensity interrogation can be employed without using a high resolution spectrometer or a narrow line-width tunable laser. Label-free detection capability of these two types of SOI sensors have also been demonstrated. This talk reviews our work on the design, fabrication and measurement of SOI nanowire based high-sensitivity biosensors employing Vernier effect. Biosensing experiments using cascaded double-ring sensor and Mach-Zehnder-ring sensor integrated with microfluidic channels are also presented.