OPTICAL WAVEGUIDE TYPE BIOSENSOR CHIP AND OPTICAL WAVEGUIDE TYPE BIOSENSOR CHIP MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide type biosensor chip enabling light detection measurement with high accuracy while maintaining high sensitivity, and a manufacturing method thereof.;SOLUTION: An optical waveguide type biosensor chip comprises: a substrate having light transmissivity; an optical waveguide layer formed on the substrate and having higher refractive index than the substrate; a first grating that makes light enter the optical waveguide layer so as to propagate the light in the optical waveguide layer; a second grating that emits the light propagated in the optical waveguide layer to the outside of the optical waveguide layer; and a metal oxide film formed on the optical waveguide layer; and a sensing film comprising at least a coloring agent fixed on the metal oxide film using a crosslinking agent.;COPYRIGHT: (C)2012,JPO&INPIT