The pieces of the puzzle: challenges in modeling of transient enhanced diffusion

摘要

It is well accepted that interstitial agglomerates, namely {311} defects and dislocation loops, play a central role in transient enhanced diffusion (TED). By controlling point defect concentrations, the formation, evolution and transformation of these defects determine the total movement of the dopant profiles. Therefore, any predictive model for TED must include a good model for {311} defects, as well as a flexible model for dislocation loops. Another critical piese of the puzzle is to understand the initial conditions prior to extended defect formation. In this paper, we investigate the importance of initial conditions and present predictive models for modeling formation and evolution of {311} defects and dislocation loops.