Pull-in instability of a probe-ring typed membrane assembly subjected to electrostatic force

摘要

The mathematical model of coupled probe-ring typed membrane system subjected to electrostatic force is constructed. It is different to the conventional nano/micro actuator which is constructed by two independent fixed/mobile conducting electrodes. The formula of pull-in voltage is presented. The analytical method for the coupled vibration is proposed. The effects of several parameters on the pull-in instability are studied.