Direct Solution of Design Synthesis for MEMS With Expected Performance— New Advances of Techniques for Analysis Design Synthesis of MEMS

摘要

The paper introduces some recent advances of the analysis method, software and design synthesis algorithms of Micro-Electro- Mechanical Systems (MEMS) in USA, proposes a solution of design synthesis based on sensitivity for MEMS. This new technique can be call as Direct Solution Algorithm (DSA) of design synthesis for MEMS with expected performance. It is regarded as a reverse problem of MEMS analysis. Behavior equation group can be educed from analysis equations. Solving the behavior equation group only need L design variables, L is number of desired behaviors. This behavior equation group can be solved using any solution algorithm of non-linear equation group. Newton Iteration Method based on sensitivity is adopted. Comparing with Genetic Algorithm (GA) and Simulated Annealing Algorithm (SA), computational workload of DSA is greatly decreased. For instance, synthesis computation of a meandering resonator only needs 4 iterations (17 analysis's), computational time is less than 30 seconds.