The Sensitive Properties Analysis of magnetron sputtering Oxide Vanadium Thin Films

摘要

In this paper, the thermal sensitive of Vanadium oxides thin films was analyzed. The vanadium oxide thin films are made by magnetron sputtering method under low substrate temperature. It is analyzed that the composition varies of vanadium oxide effects on the TCR and resistance of the thin films. In experimental, it is analyzed that the resistance of thin film varies with temperature. The composition of vanadium oxide thin film has been discussed by X ray photoelectric spectrum analysis. The effect of process condition on the composition of vanadium oxide thin films is analyzed also.