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'The Development of Microsensors using Microlithography'

机译:“使用微光刻技术开发微传感器”

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The effect of microfabrication techniques upon the development of micro processors has gone beyond the mere incorporation of micro processors into process analyzers. The micro lithography technique which was used to manufacture the micro processor is now being used to developed micro sensors. The sensors are small in size and can be mounted directly in a process and can send process information continuously and rapidly for process monitoring and control. The low cost and small size of these micro sensors would tend to predict the omnipresence of the micro sensor for the monitoring of compositions equal to that of the thermocouple for the monitoring of temperature. As with the development of any new technology the limitations and reliability of these new sensors need to be evaluated and carefully considered with each application.
机译:微制造技术对微处理器发展的影响已经超出了将微处理器仅仅集成到过程分析仪中的范围。用于制造微处理器的微光刻技术现已用于开发微传感器。传感器尺寸小,可以直接安装在过程中,并且可以连续快速地发送过程信息以进行过程监视和控制。这些微型传感器的低成本和小尺寸将倾向于预测微型传感器的无处不在,其用于监测组成等于热电偶用于监测温度。随着任何新技术的发展,这些新传感器的局限性和可靠性需要在每种应用中进行评估并仔细考虑。

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