Effects of Temperature Fluctuations on the Performance and Coupled-field Analysis of a Micromachined Gyroscope

摘要

This paper presents the modeling and coupled-field analysis for a tuning fork vibratory microgyroscope fabricated by the bulk silicon micromachining technology. The effects of environmental thermal fluctuations on the microgyroscope are considered and analysed by a nonlinear analysis process. Numerical simulations show that the frequencies and output of the microgyroscope have slight deviations when the microgyroscope works at different environmental temperature. The deviations of the frequencies and dynamic characteristics are calculated accurately, which provides a reference for the design of temperature compensation method and robust structural design for the microgyroscope.