Design of Porosity Level for Porous Si_3N_4 Ceramics Manufactured by Nitriding and Post-sintering of Si Powder Compact

摘要

Prediction of porosity level for the Si_3N_4 filter substrate manufactured by reaction bonding of Si compact and subsequent post-sintering was attempted and its validity was verified by comparison between calculation and measurement. Both are well matched in the specimens of as-nitrided and low temperature post-sintering, while few percents higher measurement in high temperature post-sintered specimens resulted from weight loss during the process.