METHOD OF MANUFACTURING POROUS SINTERED REACTION-BONDED SILICON NITRIDE CERAMICS FROM GRANULAR Si MIXTURE POWDER AND POROUS SINTERED REACTION-BONDED SILICON NITRIDE CERAMICS MANUFACTURED THEREBY

摘要

Disclosed is a porous sintered reaction-bonded silicon nitride ceramic, which includes an array of sintered granules having fine pore channels in the sintered granules and coarse pore channels formed between the sintered granules, and in which the pore channel size is controlled so that both coarse pores and fine pores are formed together in the ceramic, thus simultaneously enhancing air permeability and capturing efficiency. A method of manufacturing the porous sintered reaction-bonded silicon nitride ceramic is also provided.