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The influence of seed layer on growth of magnetite films on the SiO_2/Si(001) surface

机译:籽晶层对SiO_2 / Si(001)表面磁铁矿膜生长的影响

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摘要

Polycrystalline magnetite films with the thickness of 50 nm were grown on SiO_2/Si(001) surface by the reactive deposition of Fe in O_2 atmosphere using various preparation ways of the formation of iron oxide seed layer. The seed layers were formed by the deposition and oxidation of 3 nm Fe layer at different thermal conditions. It was found that polycrystalline magnetite films grown with the use of seed layer have [110] texture and are characterized by increase of the squareness of magnetic hysteresis loop. Structural analysis of magnetite films and predeposited seed layers was studied by RHEED.
机译:采用各种制备氧化铁籽晶层的制备方法,通过在O_2气氛中反应性沉积铁,在SiO_2 / Si(001)表面上生长了厚度为50nm的多晶磁铁矿膜。通过在不同的热条件下沉积和氧化3 nm Fe层来形成晶种层。发现利用种子层生长的多晶磁铁矿膜具有[110]织构,并且特征在于磁滞回线的矩形度增加。用RHEED研究了磁铁矿膜和预沉积种子层的结构分析。

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  • 来源
  • 会议地点 Vladivostok(RU)
  • 作者单位

    Institute of Automation and Control Processes, FEB RAS, 5 st. Radio, Vladivostok 690041, Russia,Far Eastern Federal University, 8 Sukhanova St., Vladivostok 690091, Russia;

    Institute of Automation and Control Processes, FEB RAS, 5 st. Radio, Vladivostok 690041, Russia,Far Eastern Federal University, 8 Sukhanova St., Vladivostok 690091, Russia;

    Institute of Automation and Control Processes, FEB RAS, 5 st. Radio, Vladivostok 690041, Russia;

    Institute of Automation and Control Processes, FEB RAS, 5 st. Radio, Vladivostok 690041, Russia,Far Eastern Federal University, 8 Sukhanova St., Vladivostok 690091, Russia;

    Institute of Automation and Control Processes, FEB RAS, 5 st. Radio, Vladivostok 690041, Russia,Far Eastern Federal University, 8 Sukhanova St., Vladivostok 690091, Russia;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    magnetite; seed layer; hybrid heterostructure; RHEED pattern; reactive deposition;

    机译:磁铁矿;种子层杂化异质结构RHEED模式;反应沉积;

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