Mueller matrix ellipsometry of multilayer porous columnar thin films with applications to square spiral photonic crystals

摘要

In this paper, we present the growth and optical characterization of the preliminary stages of amorphous silicon square spiral growth on pre-patterned and unpatterned sections of silicon substrates. The periodicity of the seeding was set to 1 μm using electron beam lithography, and a seed enhancement layer was deposited on top of the seeds, followed by a quarter-turn square spiral on top of that. It was found that the optical constants in the wavelength region of 1000 nm to 1700 nm for the film materials were higher for the patterned sections of the film as compared with the unpatterned sections of the film.