Advancing the charging effect correction with time-dependent discharging model

摘要

A new method to describe the resist surface charging effect more accurately is proposed. In our previous work, we handled only the static portion of the surface charging and it was applicable only to a limited situation. The scope of this paper is to add a new model to handle the dynamic, discharging behavior on top of the existing static model to make the whole charging model closer to what is really happening on the plate during the exposure. With the new model, the correction accuracy has been improved not only for the equilibrium state but also for the state when the tool is dynamically writing the main pattern. We conclude that our Charging Effect Correction (CEC) was advanced by this new model to become completely production ready