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Hybrid integration of electrical and optical interconnects

机译:电气和光学互连的混合集成

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摘要

Abstract: In this paper, we describe a novel approach for fabrication of low-cost optoelectronic modules for optical interconnect applications. The concept includes: (1) placement of optical and electrical components on a common substrate using a chip-first MCM structure to improve thermal handling capabilities, (2) fabrication of both optical and electrical interconnects using planar processes compatible to standard IC processes in manufacturing to reduce nonrecurring engineering costs, and (3) application of adaptive interconnect for device-to-waveguide alignment to reduce recurring packaging costs. Preliminary results on waveguide fabrication and modeling of adaptive interconnect are discussed in this paper. !4
机译:摘要:在本文中,我们描述了一种新颖的制造用于光学互连应用的低成本光电模块的方法。该概念包括:(1)使用芯片优先的MCM结构在公共基板上放置光学和电气组件,以提高热处理能力;(2)使用与制造中的标准IC工艺兼容的平面工艺制造光学和电气互连件以减少非重复性工程成本,以及(3)将自适应互连应用于设备到波导的对准,以减少重复性包装成本。本文讨论了波导制造和自适应互连建模的初步结果。 !4

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