Abstract: An optical focus and leveling system for ETRI KrF excimer laser stepper is developed using position sensitive detectors (PSD) and optical magnification method. This type of detection method showed focusing and leveling accuracies of about $POM 0.1 $mu@m and $POM 1.0 arcsec ($POM 0.5 $MUL 10$+$MIN@5$/ rad) respectively. Also, we confirmed experimentally the autofocus system has $POM 0.15 $mu@m signal stability within the controlled temperature range of $POM 0.1$DGR@C. In this paper, we report the design concepts of the focusing and leveling system and the characteristics of the system parameter applied to ETRI KrF excimer laser stepper. !3
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机译：摘要：利用位置敏感检测器（PSD）和光学放大方法，开发了用于ETRI KrF准分子激光步进器的光学聚焦和水平系统。这种类型的检测方法显示聚焦和调平精度分别约为$ POM 0.1 $ mu @ m和$ POM 1.0 arcsec（$ POM 0.5 $ MUL 10 $ + $ MIN @ 5 $ / rad）。此外，我们通过实验证实，自动对焦系统在$ POM 0.1$DGR@C的受控温度范围内具有$ POM 0.15 $ mu @ m的信号稳定性。在本文中，我们报告了聚焦和校平系统的设计概念以及应用于ETRI KrF准分子激光步进器的系统参数的特征。 ！3
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