Department of Power Mechanical Engineering, National Tsing Hua University, Taiwan, R.O.C.;
Institute of NanoEngineering and MicroSystem, National Tsing Hua University, Taiwan, R.O.C.;
Department of Power Mechanical Engineering, National Tsing Hua University, Taiwan, R.O.C.;
Department of Power Mechanical Engineering, National Tsing Hua University, Taiwan, R.O.C.,Institute of NanoEngineering and MicroSystem, National Tsing Hua University, Taiwan, R.O.C.;
Laser; achromatic interference lithography; large area; blazed grating;
机译:通过四梁激光干扰光刻在硅中制造的周期性抗反射表面结构
机译:干涉光刻:制造周期性结构的强大工具
机译:通过在铝合金上直接进行激光刻写和直接进行激光干涉构图制作的分层周期性表面结构上的超疏水性
机译:制造大面积和缺陷周期性结构,提前消费激光干扰光刻
机译:通过台式系统中的相干Talbot光刻技术制造的周期性金属纳米结构。
机译:通过激光干扰与随后的蚀刻制造的周期性微结构
机译:用于制造二维周期性结构的激光干涉光刻的建模和工艺设计