The fabrication of high filling factor double side micro lens array with high alignment accuracy

摘要

The high filling factor double side micro lens array (MLA) for laser beam shaping has been widely applied in opto-electrical applications. In this paper, we demonstrated the double side MLA for the laser beam shaping process. The point laser source has been successfully transformed into a two dimension uniformity light imaging. The ultra-precision slow tool servo (STS) diamond shaping and plastic injection method for MLA fabrication had been studied. The complexity micro structure of high filling factor MLA via the planning of cutting tool path is used in this research. The high alignment accuracy of both sides MLA is obtained by artful fixture design. The form accuracy and surface roughness are less than 0.1 μm and 10μm, respectively. The alignment error of both sides MLA is less than 10μm.