FABRICATION METHOD OF MICRO LENS ARRAY AND STAMPER FOR DUPLICATING MICRO LENS ARRAY

摘要

A micro lens array and a method of manufacturing a stamper for duplicating the same are provided to simplify a fabricating process by using micro lens of different shapes. A method of manufacturing a stamper for duplicating a micro lens array comprises: a coating process of coating and hardening a photoresist(101) on a substrate(102); a first exposure process of irradiating ultraviolet rays(104) on the photoresist by relatively moving a movable mask(301) having a predetermined pattern; a second exposure process of fixing a mask(303) having a repeated pattern on the substrate and irradiating the ultraviolet rays on the photoresist; a developing process of developing the substrate in order to form a cylindrical photoresist(305) on the substrate; and a thermal process of thermally processing the cylindrical photoresist in order to harden the photoresist.