Optical and masking properties of vacuum photoresists based on benzoaphenoxazine derivatives

机译：基于苯并a吩恶嗪衍生物的真空光刻胶的光学和掩膜性能

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Abstract: The influence of film chemical structure and surface modification with P$PLU ions on optical and masking properties of vacuum-deposited dye films based on benzo$LB@a$RB@phenoxazine derivatives were investigated. Relationship of implantation conditions, surface chemical structure, modified layer thickness and film optical properties was studied. The drastic change of film optical and masking properties in the result of ion implantation is caused by the formation of surface modified layer.!14

机译：摘要：研究了P $ PLU离子对膜化学结构和表面修饰的影响，对基于苯并$ LB @ a $ RB @吩恶嗪衍生物的真空沉积染料膜的光学和掩膜性能产生了影响。研究了注入条件，表面化学结构，改性层厚度和薄膜光学性能之间的关系。离子注入导致薄膜光学和掩膜特性的急剧变化是由表面改性层的形成引起的！14

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来源
《Optical Information and Technology (OIST97): Optical Recording Mechanisms and Media》|1997年|p.278-287|共10页
会议地点 Moscow(RU);Moscow(RU);Moscow(RU)
作者
Vladimir E. Agabekov; Institute of Physical Organic Chemistry; Minsk; Belarus; Olga E. Ignasheva; Institute of Physical Organic Chemistry; Minsk; Belarus.;
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正文语种 eng
中图分类无线电电子学、电信技术;
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Optical and masking properties of vacuum photoresists based on benzoaphenoxazine derivatives

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