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Characterizations of UV-Iaser damage on fused silica surfaces

机译:熔融石英表面的UV损伤损坏的特征

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Significant improvement in polishing processes of fused silica optical components, has increased optics lifetime at the wavelength of 351 nm. Nonetheless, for large laser operation facilities like the Laser MegaJoule (LMJ), zero defect optics are not yet available. Therefore a damage mitigation technique has been developed to prevent the growth of initiated damage sites: this technique consists in a local melting and evaporation of silica by CO2 laser irradiation on the damage site. Because of the difficulty to produce efficient mitigated sites with large depth, the initial depth of damage to mitigate is a critical issue. An aim of our work was to determine the real extension of the damage site (including fractures) for different laser pulse durations between 3 ns and 16 ns and at different laser fluences. The fractures are non-detectable in conventional microscopy. The depth of the damage can thus be underestimated. Hence confocal microscopy, was used to observe these sub-surface fractures and to measure precisely the depth of damage. Results show that the damage is 2 to 4 times wider than deeper and this ratio is independent of the pulse duration and of the fluence. With this new information, the mitigation process can now be optimized.
机译:熔融石英光学元件抛光工艺的显着改善,增加了在351 nm波长下的光学寿命。但是,对于大型激光操作设备,例如Laser MegaJoule(LMJ),尚无零缺陷光学器件。因此,已经开发出一种减轻损害的技术来防止引发的损伤部位的生长:该技术在于通过在损伤部位上进行CO 2激光辐照来使二氧化硅局部熔化和蒸发。由于难以产生大深度的有效减灾站点,因此减灾的初始深度是一个关键问题。我们的工作目的是确定在3 ns和16 ns之间的不同激光脉冲持续时间和不同的激光注量下,损伤部位(包括骨折部位)的实际扩展。常规显微镜无法检测到骨折。因此,损坏的深度可能会被低估。因此,使用共聚焦显微镜观察这些表面下的骨折并精确测量损伤的深度。结果表明,伤害是深处的2至4倍,并且该比率与脉冲持续时间和注量无关。利用这些新信息,现在可以优化缓解过程。

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