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Characterizations of UV-laser damage on fused silica surfaces

机译:UV激光损伤对熔融二氧化硅表面的特征

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Significant improvement in polishing processes of fused silica optical components, has increased optics lifetime at the wavelength of 351 nm. Nonetheless, for large laser operation facilities like the Laser MegaJoule (LMJ), zero defect optics are not yet available. Therefore a damage mitigation technique has been developed to prevent the growth of initiated damage sites: this technique consists in a local melting and evaporation of silica by CO2 laser irradiation on the damage site. Because of the difficulty to produce efficient mitigated sites with large depth, the initial depth of damage to mitigate is a critical issue. An aim of our work was to determine the real extension of the damage site (including fractures) for different laser pulse durations between 3 ns and 16 ns and at different laser fluences. The fractures are non-detectable in conventional microscopy. The depth of the damage can thus be underestimated. Hence confocal microscopy, was used to observe these sub-surface fractures and to measure precisely the depth of damage. Results show that the damage is 2 to 4 times wider than deeper and this ratio is independent of the pulse duration and of the fluence. With this new information, the mitigation process can now be optimized.
机译:熔化二氧化硅光学元件的抛光过程的显着改善,在351nm的波长下具有增加的光学器件寿命。尽管如此,对于像激光Megajoule(LMJ)这样的大型激光操作设施,零缺陷光学器件尚不可用。因此,已经开发了一种损伤减缓技术以防止发起的损伤部位的生长:该技术在损伤部位上通过CO2激光照射局部熔化和蒸发二氧化硅。由于难以产生大深度的有效缓解的部位,减轻缓解的初始损害深度是一个关键问题。我们的作品的目的是确定损伤部位(包括骨折)的真实延伸,在3 ns和16ns和不同的激光流量之间进行不同的激光脉冲持续时间。在常规显微镜下,裂缝是不可检测的。因此可以低估损坏的深度。因此,共聚焦显微镜,用于观察这些亚表面骨折并精确测量损坏的深度。结果表明,损坏比深度更深的损坏是2至4倍,而该比率与脉冲持续时间和流量的流量无关。通过此新信息,现在可以优化缓解过程。

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