Leveraging Mainstream Design and Analysis Tools for MEMS

摘要

Mainstream CAD/CAE tools are used to rapidly design and commercialize a broad product line of rugged MEMS-based optoelectronic devices for applications including telecom, oil and gas production, process monitoring, medical diagnostics, and scientific discovery. These tools deliver the robust capabilities previously available only with specialized, often expensive, MEMS-focused options. This paper illustrates some of the considerations in choosing a MEMS CAD/CAE tool, and provides examples of mainstream tools successfully used in MEMS design and analysis.