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Phase-locked arrays of vertical-cavity surface-emitting lasers

机译:垂直腔面发射激光器的锁相阵列

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Abstract: Vertical-cavity surface-emitting lasers (VCSELs) are of increasing interest to the photonics community because of their surface-emitting structure, simple fabrication and packaging, wafer-level testability, and potential for low cost manufacture. Scaling VCSELs to higher power outputs requires increasing the device area, which leads to transverse mode control difficulties if devices become larger than about 5 microns. One approach to increasing the device size while maintaining a well controlled transverse mode profile is formation of coupled or phase-locked 2D arrays of VCSELs that are individually single-transverse mode. Such arrays have unique optical properties, not all of which are desirable. This paper covers some of the basic principles of these devices and reviews recent work on device designs, fabrication and operation. A technique for improving the far- field properties of the arrays is demonstrated and performance limitations are discussed. !28
机译:摘要:垂直腔表面发射激光器(VCSEL)由于其表面发射结构,简单的制造和封装,晶圆级可测试性以及低成本制造的潜力而受到光子学界的越来越多的关注。将VCSEL缩放至更高功率输出需要增加器件面积,如果器件变得大于约5微米,则会导致横向模式控制困难。在保持良好控制的横向模式轮廓的同时增加器件尺寸的一种方法是形成单独的单横向模式的VCSEL耦合或锁相2D阵列。这样的阵列具有独特的光学性质,并不是所有的光学性质都是理想的。本文涵盖了这些器件的一些基本原理,并回顾了有关器件设计,制造和操作的最新工作。演示了一种改善阵列远场特性的技术,并讨论了性能限制。 !28

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