VISIBLE LIGHT EMISSION FROM A NEW MATERIAL SYSTEM: Si/SiO_2 SUPERLATTICES IN OPTICAL MICROCAVITIES

摘要

In order to add optical functionalities to silicon based microelectronics, we decided to develop Si/SiO_2 superlattices where quantum confinement effects should drive Si to become a good emitter. A further improvement it is possible when one couples the beneficial effects of low dimensional electronic systems (as in Si superlattices) with the enhancement of the spontaneous emission rate that occurs in an optical microcavity. Not to lose the fundamental goal to add optical functionality to electronic circuits we have performed the growth of this material in an industrial environment by using standard CMOS equipments. In this paper, we will present the status of our research.