Achieving mass fabrication of microoptical systems by combining deep-x-ray lithography electroforming micromolding and embossing

摘要

Abstract: The paper reviews the application of deep X-raylithography in conjunction with electroforming, plasticmolding, and stamping (LIGA) for a mass production ofmicro- and submicron-structured photonic devices. LIGAtechnology offers almost total design freedom inlateral structuring and a high aspect ratio of 100.Vertical walls with heights up to 1 mm and opticalgrade surfaces enable their use as functional opticalsurfaces. It is possible to process a variety ofmaterials such as metals and different polymers,including those with nonlinear optical properties.Therefore, Y-branches, couplers, and structures for thepositioning and fixing of fibers, detectors, and lightemitters can be integrated on one chip to build uphybrid optoelectronic devices. !0