Fraunhofer Institute for Photonic Microsystems (FhG-IPMS), AMS, Microscanner RD, Dresden, Germany;
Fraunhofer Institute for Photonic Microsystems (FhG-IPMS), AMS, Microscanner RD, Dresden, Germany;
Fraunhofer Institute for Photonic Microsystems (FhG-IPMS), AMS, Microscanner RD, Dresden, Germany;
Fraunhofer Institute for Photonic Microsystems (FhG-IPMS), AMS, Microscanner RD, Dresden, Germany;
Fraunhofer Institute for Photonic Microsystems (FhG-IPMS), AMS, Microscanner RD, Dresden, Germany;
Institute of Automation, Faculty of Electrical and Computer Engineering, Technische Universitat Dresden, 01062 Dresden, Germany;
quasi-static; electrostatic; micro mirror; 2D raster scan; staggered vertical comb drive; piezo-resistive sensor; flatness-based closed loop control; microcontroller based mirror driver; residual oscillation;
机译:使用JERK限制轨迹设计的静电准静态微透视器的平坦度的开环和闭环控制
机译:基于AVR微控制器的传感器自主片上调试
机译:基于AVR微控制器的传感器自主片上调试
机译:基于微控制器的闭环控制2D准静态/谐振Microscanner,片上压电传感器反馈
机译:使用电热执行器和电容位移传感器的反馈可控1D和2D微型定位器。
机译:磁电动手抓住闭环控制的触觉反馈:通过单个反馈通道同时传送多个传感器的信息
机译:基于可调电容式位置传感器的压电微扫描仪低功率闭环驱动电路