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Design and analysis of a micro-optical position readout for acceleration sensing

机译:用于加速度传感的微光学位置读出器的设计和分析

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Abstract: Sandia National Laboratories is developing a MEMS-based trajectory safety subsystem, which allows enablement of critical functions only after a particular acceleration environment has been achieved. The device, known as an Environmental Sensing Device (ESD), consists of a suspended moving shuttle that translates a given distance when exposed to an appropriate acceleration environment. The shuttle contains an embedded code, consisting of grating structures, hat is illuminated and optically read using a semiconductor laser and detector integrated together in a GaAs-based Photonic Integrated Circuit (PIC) flip-chip bonded to the assembly. This paper will describe the optical design and performance analysis of the embedded code features in the shuttle. !4
机译:摘要:桑迪亚国家实验室(Sandia National Laboratories)正在开发基于MEMS的轨迹安全子系统,该子系统仅在实现特定的加速环境后才允许关键功能的启用。该设备称为环境传感设备(ESD),由悬浮的移动往复装置组成,该往复装置在暴露于适当的加速环境中时会平移给定的距离。航天飞机包含一个嵌入的代码,该代码由光栅结构组成,使用半导体激光器和检测器对帽子进行照明和光学读取,检测器集成在结合到组件上的基于GaAs的光子集成电路(PIC)中。本文将介绍航天飞机中嵌入式代码功能的光学设计和性能分析。 !4

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