SiO2 electret induced by potassium ions on a comb-drive actuator

摘要

This paper reports a novel SiO2 electret on comb-drive actuator, which is formed by concise procedure and low cost. The SiO2 electret is generated by doping potassium ions and formed on vertical walls of driving electrodes in a comb-drive actuator. The current generated by the extraneous vibration was observed, so this device is thought to be useful as the vibration power generator.