The Fabrication of MEMS Fuze Safety Device

摘要

This paper presents a new microfabrication method of MEMS fuze safety device,which is combined with SU-8 thick photoresist UV lithography process, micro-electroforming process, no back plate growing process and the process of SU-8 as sacrifice layer. Different from other microfabrication methods, the MEMS fuze safety device with vertical sidewalls was fabricated by micro nickel electroforming directly on Nickel substrate. In this paper, two kinds of double-layer large-displacement devices had been fabricated on metal substrates directly. Besides, some problems in the fabrication process had been discussed.