Optimization Based on ANSYS Electric Numerical Method for a Novel MEMS ESI-MS Ion Focusing Device

摘要

In order to improving ion transmission efficiency from atmospheric pressure MEMS ion sources to mass spectrometry,a novel ion focusing device has been developed and simulated by ANSYS software with finite element numerical method (FEM). The ion focusing device consists of two electrodes with progressively smaller internal diameter to which electric field are applied. Taguchi DOE has been used in the process of optimization of the structure and diameters of the device. Postprocessing will be implemented by Kriging interpolation method. The shapes of equipotential lines are measured to obtain the response for Taguchi DOE by CAD software. The significance of each factor and optimized structure has been obtained by signal-to-noise ratio and means variance analysis. The simulation results will provide good preference for the experimental stage.