首页> 外文会议>International Electron Devices Meeting >A new cathode for vacuum microelectronic devices: silicon tip avalanche cathode
【24h】

A new cathode for vacuum microelectronic devices: silicon tip avalanche cathode

机译:真空微电子器件的新阴极:硅尖雪崩阴极

获取原文

摘要

A new cathode for the vacuum microelectronic devices-Silicon Tip Avalanche Cathode (STAC) has been developed. A STAC is a silicon field emitter with a shallow n/sup +/-p/sup +/ junction formed on the tip. It has been demonstrated that the extraction voltage required to produce 0.1 /spl mu/A per tip is reduced from 97 V to 72 V as the reverse bias applied to the n/sup +/-p/sup +/ junction is increased from 0 V to 35 V. Also a new model based on the field emission from the surface states is proposed and used to explain the emission current enhancement of STAC.
机译:已经开发出用于真空微电子器件的新阴极 - 硅尖雪崩阴极(Stac)。 STAC是硅场发射器,在尖端上形成浅n / sup +/-p / sup + /结。已经证明,每尖端产生0.1 / SPL MU / A所需的提取电压从97 V至72V降低,因为施加到N / SUP +/- P / SUP + /结的反向偏压从0增加v至35 V.还提出了一种基于表面状态的场发射的新模型,并用于解释STAC的发射电流增强。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号