Cold cathode ionization vacuum gauge , vacuum processing apparatus equipped with the cold cathode ionization vacuum gauge , pressure measurement method using discharge starting auxiliary electrode used to the cold cathode ionization vacuum gauge , the the cold cathode ionization vacuum gauge

摘要

PROBLEM TO BE SOLVED: To provide a cold cathode ionization vacuum gauge that can trigger discharge in a short time even after a long period of operation.;SOLUTION: A cold cathode ionization vacuum gauge according to the present invention includes an anode 2, a cathode 1 so as to form a discharge space 9 with the anode 2, and a discharge starting auxiliary electrode 25 disposed in the discharge space 9 and electrically connected to the cathode 1. The discharge starting auxiliary electrode 25 has an electrode portion 26 disposed in parallel with an axially longitudinal direction of the anode 2.;COPYRIGHT: (C)2012,JPO&INPIT