Generation of extremely high vacuum by ordinary procedures with a SUS304 vacuum chamber and total and partial pressure measurements by hot cathode ionization gauges and a quadrupole mass spectrometer

摘要

The present study generated an extremely high vacuum of 10~(-10) Pa by very common methods such as using SUS304 chamber material, electropolishing surface treatment and turbomolecular pumping technology. We examined the gas phase and electron-stimulated desorption ions of the ion gauges, the effect of ambient temperature, total pressure and H_(2) partial pressure. One of the results showed that, as is well known, most of the residual gas in the extremely high vacuum chamber was H_(2) but there was also a little F, which is not so well known.