Whole Wafer Design and Fabrication for the Alignment of Nanostructures for Chemical Sensor Applications - (PPT)

摘要

Standardized approach to chemical sensors processing using nanostructures - Integration and alignment of nanostructures with microfabrication methods. Mass production of sensors with uniformly controlled properties. Approach addresses significant barriers in integrating nanotechnology with microsensors, such as - Deposition control; - Contact robustness; - Simplified processing. Resulting sensors can be used in applications where presently microsensors are used. Further refinement of the DEP and photoresist suspension are planned to increase and to better control the yield for each paired contact pattern. Current work in applying mass production approach with metal oxide nanostructures.