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Combined soft lithographic and electrochemical fabrication of nanostructured platinum microelectrode arrays for miniaturized sensor applications

机译:纳米结构铂微电极阵列的软光刻和电化学组合制造,可用于小型传感器应用

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摘要

Facile fabrication of large electroactive surface area Pt microelectrodes by a combined soft lithographic and electroplating approach is reported. Pt nanostructures have been obtained on Au interdigitated array templates using potentiodynamic electrodeposition in additive-free platinisation solution. The surface morphology and chemical composition of the Pt microelectrodes were characterised by scanning electron microscopy and energydispersive X-ray spectroscopy (EDS) techniques. The developed fabrication approach proved to be highly reproducible, and the obtained nanostructured Pt surfaces exhibited high sensitivity to H2O2 (2662 mu A cm(-2) mM(-1)) as tested by cyclic voltammetry and chronoamperometry. The linear range of the Pt microelectrode sensor spanned from 1 mu M to 6 mM, the limit of detection was as low as 21.7 nM. The demonstrated precise, simple, wet bench-compatible fabrication approach resulting in the controlled growth of Pt nanostructures is promising for the development of low dimention sensors for medical, biotechnological and other analytical applications.
机译:据报道,通过软光刻和电镀相结合的方法可以方便地制造大电活性表面积的Pt微电极。在无添加剂的镀铂溶液中使用电位动力学电沉积在Au叉指阵列模板上获得了Pt纳米结构。通过扫描电子显微镜和能量色散X射线光谱(EDS)技术表征了Pt微电极的表面形态和化学成分。通过循环伏安法和计时电流法测试,开发的制造方法被证明具有很高的可重复性,并且获得的纳米结构的Pt表面对H2O2(2662μAcm(-2)mM(-1))表现出高灵敏度。 Pt微电极传感器的线性范围从1μM到6 mM,检测极限低至21.7 nM。证明的精确,简单,与湿台兼容的制造方法可导致Pt纳米结构的受控生长,对于开发用于医学,生物技术和其他分析应用的低尺寸传感器很有希望。

著录项

  • 来源
    《Microelectronic Engineering》 |2019年第3期|39-46|共8页
  • 作者单位

    Ctr Phys Sci & Technol, Dept Nanoengn, Savanoriu Ave 231, Vilnius, Lithuania;

    Ctr Phys Sci & Technol, Dept Electrochem Mat Sci, Savanoriu Ave 231, Vilnius, Lithuania;

    Ctr Phys Sci & Technol, Dept Nanoengn, Savanoriu Ave 231, Vilnius, Lithuania;

    Ctr Phys Sci & Technol, Dept Characterizat Mat Struct, Savanoriu Ave 231, Vilnius, Lithuania;

    Ctr Phys Sci & Technol, Dept Nanoengn, Savanoriu Ave 231, Vilnius, Lithuania;

    Ctr Phys Sci & Technol, Dept Nanoengn, Savanoriu Ave 231, Vilnius, Lithuania;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Platinum; Microelectrode; Fabrication; Hydrogen peroxide;

    机译:铂;微电极;制造;过氧化氢;

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