Observation of surface and cross section of amorphous fluorocarbon films composed by perfluoro-octane plasma-enhanced chemical vapor deposition

摘要

We present scanning electron spectroscopy (SEM) images of the surface and cross section oflayered amorphous fluorocarbon (a-C:F) polymer films synthesized by an RF (13.56 MHz)plasma-enhanced chemical vapor deposition (PECVD) using perfluoro-octane (C8F18). Formationof particles and their clusters on the film surface was observed. The particles and clusters wereformed when the deposition time was relatively short (1?3 min), and a tendency that the surface wassmoothed was indicated when Ar was mixed to C8F18 or the deposition time was long (5 min orlonger). The dependence of the morphology of the film surface on the condition of the PECVD isdiscussed from a viewpoint of the degree of the C8F18 decomposition in the gas phase.