Research of spectral descriptions films of amorphous hydrogenatedsilicon received magnetron method with use of the ionic source.

摘要

Spectral characteristics films of amorphous hydrogenated silicon received by a magnetron method with use of an ionicsource are investigated. As results of researches of temperature dependences on a condition of hydrogen in argon-hydrogen plasma are resulted and a number of laws influencing on electric and optical properties amorphous films isrevealed.