Synthesis of Psi/CuO/Cu_2o Heterostructure for NH_3 Vapor Detection at Room Temperature

摘要

In this paper, we demonstrate the use of the heterostructure porous silicon PSi-n/CuO-p/Cu_2O-n as an alternative structure for an efficient gas sensor for NH_3 sensing. The porous silicon PSi was prepared using an electrochemical method and utilized as a substrate. Then, CuO homogeneous thin films were synthesized by thermal evaporation/oxidation on the pre-prepared PSi substrate, on which a uniform layer of Cu_2O is deposited by electrodeposition method.