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Highly Sensitive Sensor for Flow Velocity and Flow Direction Measurement

机译:用于流速和流动方向测量的高度敏感传感器

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Miniaturized sensors for flow velocity and flow direction measurement based on thin-film germanium thermistors (TCR = -1.8%/K) offering extremely high sensitivity were developed. The thermistors are placed on a silicon nitride diaphragm (1.3 mum thick) which is carried by a silicon frame. To resolve the direction of the flow, eight thermistors are arranged circularly on the diaphragm. Two orthogonal pairs of diametrically opposed thermistors (e.g., N-S and E-W) feature a directional sensitivity of 152 muV/deg at a flow velocity of 1 m/s. An increase of the sensitivity of about 50% can be gained by analyzing the difference signal of two 90deg rotated thermistors (e.g., N-E), which are in the downstream position. The measurable gas flow rate ranges from 0.025 m/s to about 3 m/s for the constant power mode. The sensor has a high sensitivity to flow direction of 30 mVs/m at low flow rates from 0.025 m/s to 0.2 m/s.
机译:开发了基于薄膜锗热敏电阻的流速和流动方向测量的小型化传感器(TCR = -1.8%/ k),提供了极高的灵敏度。 将热敏电阻放置在由硅框架承载的氮化硅膜(1.3毫米厚)上。 为了解决流量的方向,八个热敏电阻圆形横膈膜圆形布置。 两个正交的径向相对的热敏电阻(例如,N-S和E-W)具有152μV/ deg的方向灵敏度,其流速为1m / s。 通过分析在下游位置的两个90deg旋转热敏电阻(例如,N-E)的差信号,可以增加约50%的灵敏度的增加。 可测量的气体流量为恒定功率模式的0.025 m / s至约3 m / s。 传感器具有高灵敏度,以0.025m / s的低流速流向30mVs / m的流动方向。

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