PROBLEM TO BE SOLVED: To provide a flow velocity sensor element whose flow velocity measurement accuracy especially at a low flow velocity region has been improved, and to provide a flow velocity sensor utilizing the flow velocity sensor element.;SOLUTION: The flow velocity sensor element 10 is provided with a capillary structure 1 that is as long as 20 m-500 m or 500 m-5 mm, support beams 2-1 to 2-4 that are provided on the base section of the capillary structure 1 and are formed to support the capillary structure 1, and strain gauges 3-1 to 3-4 that are provided at each of the support beams 2-1 to 2-4. The support beams 2-1 to 2-4 are supported by a substrate 4, and are integrated on the substrate 4. The capillary structure 1 is deformed when it comes into contact with fluid, and the deformation is detected by the strain gauges 3-1 to 3-4 via the support beams 2-1 to 2-4, thus indirectly measuring the flow velocity of the fluid from the detection value.;COPYRIGHT: (C)2002,JPO
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