MANUFACTURING METHOD FOR THERMAL FLOW VELOCITY/FLOW RATE SENSOR, AND THERMAL FLOW VELOCITY/FLOW RATE SENSOR

摘要

by using a general-purpose electronic component and a substrate manufacturing apparatus and the automatic line-mounted device, by mounting the heater elements and the temperature detecting element is mounted part of a general purpose on both sides of the substrate constitutes the flow rate detector. In addition, forming the flow rate detecting part-forming support substrate of one end integrally extend from the middle portion to the elongated shape of the main portion, and forms the flow rate detecting unit at a distal end portion of the support portion. In addition, and with each interval the elongated flow rate detecting part-forming support and the temperature measuring part-forming support part extending integrally formed from one end side portions of the substrate main portion, by forming the respective flow rate detecting section and the temperature measuring portion to the distal end portion of these supports, the flow rate It was to provide a space between the detection unit and the temperature measuring section. Further, by forming a pair of flow rate detecting part-forming support of elongated shape that extends integrally toward the center from the substrate main portion constituting the outer peripheral portion of the band-shaped, forming a flow rate detection unit to the distal end of these support portion, the outer portion of the strip-like at the same time as the guard portion to protect the flow rate detecting unit, and to make space between the flow rate detecting section and temperature measuring module. ;