MANUFACTURING METHOD FOR THERMAL FLOW VELOCITY/FLOW RATE SENSOR AND THERMAL FLOW VELOCITY/FLOW RATE SENSOR

摘要

A flow rate detecting section is constructed by mounting a general-purpose mounting element such as a heater element and a temperature-sensing element on both sides of a substrate by using a general-purpose electronic component and a substrate manufacturing apparatus and an automatic mounting machine line. Further, a support portion for an elongated flow velocity detecting portion integrally extending from the central portion of one end of the main portion of the substrate is formed, and a flow velocity detecting portion is formed at the tip end portion of the support portion. In addition, a support portion for a flow velocity detecting portion and a support portion for an air temperature measuring portion each having an elongated shape extending integrally from both ends of one end portion of the main portion of the board are formed with a space therebetween, and a flow velocity detecting portion and a temperature-And a space is provided between the detection unit and the air temperature measurement unit. Further, by forming support portions for a pair of elongated thin-walled flow velocity detecting portions integrally extending from the main portion of the substrate constituting the belt-like outer peripheral portion, and forming the flow velocity detecting portions at the tips of these supporting portions, A guard portion for protecting the flow velocity detection portion is provided, and a space is provided between the flow velocity detection portion and the air temperature measurement portion.;