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Polariton-enhanced near field lithography and imaging with infrared light

机译:Polariton - 近场光刻和红外光成像

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A novel approach to making a material with negative index of refraction in the infrared frequency band is described. Materials with negative dielectric permittivity ε are utilized in this approach. Those could be either plasinonic (metals) or polaritonie (semiconductors) in nature. A sub-wavelength plasmonic crystal (SPC), with the period much smaller than the wavelength of light, consisting of nearly-touching metallic cylinders is shown to support waves with negative group velocity. The usage of such waves for sub-wavelength resolution imaging is demonstrated in a numerical double-slit experiment. Another application of the negative-epsilon materials is laser-driven near field nanolithograpliy. Any plasmonic or polaritonie material with negative ε = -ε_d sandwiched between dielectric layers with ε_d > 0 can be used to significantly decrease the feature size. It is shown that a thin slab of SiC is capable of focusing the mid-IR radiation of a CO_2 laser to several hundred nanometers, thus paving the way for a new nano-lithographic technique: Phonon Enhanced Near Field Lithography in Infrared (PENFIL). Although an essentially near-field effect, this resolution enhancement can be quantified using far-field measurements. Numerical simulations supporting such experiments are presented.
机译:描述了一种在红外频带中制造具有负折射率的材料的新方法。采用负介电常数ε的材料以这种方法利用。那些本质上可以是普拉斯诺克(金属)或Polaritizie(半导体)。具有远远小于光波长的子波长等级晶体(SPC),由近接触金属缸组成,以支撑具有负群速度的波。在数值双缝实验中说明了用于子波长分辨率成像的这种波的用法。负ε材料的另一个应用是激光驱动的近场纳米粒子普利。具有负ε=-ε_d的任何等离子体或极性onie材料,可以使用与ε_d> 0的介电层夹在介电层之间,以显着降低特征尺寸。结果表明,SiC的薄板可以将CO_2激光的中红外辐射聚焦到几百纳米,从而为新的纳米光刻技术铺平道路:声子于红外线(PENFIL)的近场光刻增强。虽然基本上近场效果,但是可以使用远场测量来量化该分辨率增强。提出了支持这些实验的数值模拟。

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