An experimental study on iron thin films obtianed by laser pyrolysis of iron pentacarbonyl vapour

摘要

The results of a study on laser-assisted CVD of iron thin films from Fe(CO)_5 vapour using a CO_2 laser are presented. The iron-based layers deposited onto quartz substrates were characterised by different analytical techniques, and the influence of the precursor pressure and laser incident energy on the physical and chemical properties of films was pointed out. It was deduced that the purity of the as-deposited films depends on the differnet phases of carbon incorporation, which in turn is strongly influenced by the dynamics of the prevaling gas-phase processes.