Verification of the phase-noise model for MEMS oscillators operating in the nonlinear regime

摘要

We experimentally verify the phase-noise model for oscillators operating in a nonlinear regime by testing a micromechanical resonator-based oscillator (MEMS oscillator). Operation of oscillators in the nonlinear regime had been believed to induce instability [1] - a belief we have demonstrated to be mistaken [2]. As a result of this misunderstanding, little study has been devoted to the phase-noise performance of oscillators in the nonlinear regime. In this study, we compare measurements of the phase noise of MEMS oscillators far into the nonlinear regime and compare them with a recent prediction [3]. This paper provides confirmation that low phase-noise performance is possible in the nonlinear regime, and confirms that models can be used to predict and optimize performance.