Suspended single-crystal diamond micro/nano-beams with well-controlled dimensions are fabricated in batch for nanoelectromechanical system (NEMS). All-single crystal diamond NEM switches are demonstrated using these suspended beams with high performance such as high reproducibility, high controllability, and repeated switching based on the concept of diamond-on-diamond. The switches make full use of the superior properties of diamond such as an extremely high Young's modulus (>1000GPa), high wear resistance, the highest thermal conductivity, and a hydrophobic surface. Diamond switches can not only overcome the stiction and abrasion problems in existing electromechanical switches, but also circumvent the shallow doping problem. This work opens the avenue for single crystal diamond NEMS toward high performance and harsh environments.
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