Gold Nanoparticles Embedded Silicon Channel Biosensor For Improved Sensitivity

摘要

This project discusses the fabrication steps of a biosensor device on silicon-on-insulator (SOI) wafer. Conventional photolithography technique is used to fabricate the device. The gold nanoparticles (GNPs) are then used to enhance the sensitivity of the device. By incorporating the GNPs, it is expected to get higher current compared with the device without GNPs due to better conductivity of gold and higher volume-to-ratio. Hence, with the addition of GNPs, it may boost up the signal and enhance the sensitivity of the device.