Effect of Hydrolysis Modifier on the Properties of ATO Films Prepared by Spin Coating

摘要

ATO thin films have been successfully prepared by the spin coating method using an ethanol solution of SnCl_4-5H_2O and SbCl_3 using acetylacetone as hydrolysis modifier. ATO films from 1 to 6 layers were prepared at 300 °C as densification temperature and within an annealing temperature ranging from 450 °C to 750 °C. Films exhibited the cassiterite crystalline phase and morphology consisted in nanoparticles of about 10 nm in diameter. Acetylacetone content as well the addition of water affected the particle size and morphology, decreasing particle size and the appearance of voids. Films prepared at an acetylacetone ratio of 4 with no addition of water exhibited an optical transparency above 90% from 380 to 800 nm while resistivity was 7.99 ×l0~(-3) Ω-cm. The effect of the hydrolysis modifier on the electric properties, morphology, optical transparency and microstracture has been studied